| 標題: | Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes |
| 作者: | Chiou, JC Lin, YC Wu, SD 電控工程研究所 Institute of Electrical and Control Engineering |
| 公開日期: | 2002 |
| URI: | http://hdl.handle.net/11536/18824 |
| ISBN: | 0-7803-7595-5 |
| 期刊: | 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST |
| 起始頁: | 85 |
| 結束頁: | 86 |
| 顯示於類別： | 會議論文 |
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- A micromirror device with tilt and piston motions / Chiou, JC;Lin, YC
- The design and assembly of surface-micromachined optical switch for optical add/drop multiplexer application / Lin, YC;Chiou, JC;Lin, WT;Lin, YJ;Wu, SD
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