Title: Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes
Authors: Chiou, JC
Lin, YC
Wu, SD
電控工程研究所
Institute of Electrical and Control Engineering
Issue Date: 2002
URI: http://hdl.handle.net/11536/18824
ISBN: 0-7803-7595-5
Journal: 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST
Begin Page: 85
End Page: 86
Appears in Collections:Conferences Paper