Parameter extraction of resistive thermal microsensors by AC electrical method

Abstract

Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. We report an A.C. electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficience of resistance, thermal capacitance and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results obtained are compared with other methods.