標題: | Integrated Accelerometer with Capacitance to Digital Interface Circuit Design based on monolithic 0.18 mu m CMOS MEMS technology |
作者: | Wang, Chun-Chieh Fan, Long-Sheng Wen, Kuei-Ann 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 2012 |
摘要: | A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process. |
URI: | http://hdl.handle.net/11536/21622 |
ISBN: | 978-1-4577-1766-6 |
ISSN: | 1930-0395 |
期刊: | 2012 IEEE SENSORS PROCEEDINGS |
起始頁: | 1790 |
結束頁: | 1793 |
顯示於類別: | 會議論文 |