標題: Integrated Accelerometer with Capacitance to Digital Interface Circuit Design based on monolithic 0.18 mu m CMOS MEMS technology
作者: Wang, Chun-Chieh
Fan, Long-Sheng
Wen, Kuei-Ann
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2012
摘要: A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process.
URI: http://hdl.handle.net/11536/21622
ISBN: 978-1-4577-1766-6
ISSN: 1930-0395
期刊: 2012 IEEE SENSORS PROCEEDINGS
起始頁: 1790
結束頁: 1793
顯示於類別:會議論文