標題: | Effect of SiO(2) Additive As Inhibitor on Crystalline Structure and H(2)S Sensing Performance of CuO-Au-SnO(2) Thin Film Prepared by Liquid Phase Deposition |
作者: | Chiou, Jin-Chern Tsai, Shang-Wei Chiou, Jin-Chern Huang, Cheng-Tang 電機工程學系 Department of Electrical and Computer Engineering |
公開日期: | 1-一月-2010 |
摘要: | In situ SiO(2)-doped SnO(2) thin films have been prepared by liquid phase deposition method. The effect of SiO(2) additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO(2)-doped CuO-Au-SnO(2) gas sensors (Si/Sn = 0.25 and 0.33) have greater sensitivity and shorter response time than CuO-Au-SnO(2) gas sensor. However, the doped CuO-Au-SnO(2) gas sensors (Si/Sn = 0.33) can obtained better sensitivity ( S = 67 for 2ppm) and response time (t90% < 3 s). |
URI: | http://dx.doi.org/10.1109/ICSENS.2010.5690256 http://hdl.handle.net/11536/26809 |
ISBN: | 978-1-4244-8168-2 |
ISSN: | 1930-0395 |
DOI: | 10.1109/ICSENS.2010.5690256 |
期刊: | 2010 IEEE SENSORS |
Volume: | |
Issue: | |
起始頁: | 333 |
結束頁: | 336 |
顯示於類別: | 會議論文 |