標題: Effect of SiO(2) Additive As Inhibitor on Crystalline Structure and H(2)S Sensing Performance of CuO-Au-SnO(2) Thin Film Prepared by Liquid Phase Deposition
作者: Chiou, Jin-Chern
Tsai, Shang-Wei
Chiou, Jin-Chern
Huang, Cheng-Tang
電機工程學系
Department of Electrical and Computer Engineering
公開日期: 1-一月-2010
摘要: In situ SiO(2)-doped SnO(2) thin films have been prepared by liquid phase deposition method. The effect of SiO(2) additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO(2)-doped CuO-Au-SnO(2) gas sensors (Si/Sn = 0.25 and 0.33) have greater sensitivity and shorter response time than CuO-Au-SnO(2) gas sensor. However, the doped CuO-Au-SnO(2) gas sensors (Si/Sn = 0.33) can obtained better sensitivity ( S = 67 for 2ppm) and response time (t90% < 3 s).
URI: http://dx.doi.org/10.1109/ICSENS.2010.5690256
http://hdl.handle.net/11536/26809
ISBN: 978-1-4244-8168-2
ISSN: 1930-0395
DOI: 10.1109/ICSENS.2010.5690256
期刊: 2010 IEEE SENSORS
Volume: 
Issue: 
起始頁: 333
結束頁: 336
顯示於類別:會議論文