LARGE-SCALE AND ENHANCED EFFICIENCY C-SI SOLAR CELL WITH MOTH-EYE-LIKE BY USING SELF-ASSEMBLED LITHOGRAPHY

Abstract

We demonstrated the Si solar cell with ladder-shaped nanorod array, fabricated by combined the self-assembled lithography and reactive-ion etching technique. The measurement of angular reflective spectrums of the solar cell with ladder-shaped nanorod array using an integration sphere remained lower at broadband spectra and large angle of incident compared to the solar cell with micro-textured surface. The I-V measurement shown the current density and conversion efficiency could be improved by the ladder-shaped nanorod array. The enhancement conversion efficiency approached to 34.54%.