標題: Iron and cobalt silicide catalysts-assisted carbon nanostructures on the patterned Si substrates
作者: Chang, HL
Lin, CH
Kuo, CT
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: carbon;field emission;chemical vapor deposition;catalysis
公開日期: 2-十二月-2002
摘要: Catalyst-assisted carbon nanotubes (CNTs) and carbon nano-rods were synthesized on the patterned or un-patterned Si wafer by microwave plasma chemical vapor deposition, using iron or cobalt silicide catalysts. Controllable carbon nanostructures were achieved by manipulating carbon and nitrogen concentration in the source gases, catalyst materials, and patterned wafer application. CNTs were synthesized under a high ratio of CH4/H-2 = 0.1, while carbon nano-rods were synthesized under a low ratio of CH4/H-2=0.01. Introducing N-2 gas into CH4/H-2 source gases gives rise to bamboo-like CNTs formation. Selective CNTs depositions were applied on (a) parallel Fe-coated line arrays, (b) CoSix-coated hole arrays. This is a novel method that is compatible with Si microelectronic device manufacturing. The field emission results indicate that the emission current density can be above 1 mA/cm(2) at 3.97 V/mum, and hollow like CNTs belong to better emission current than bamboo-like CNTs. Growth models of different carbon nanostructures are proposed. (C) 2002 Elsevier Science B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(02)00749-6
http://hdl.handle.net/11536/28319
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(02)00749-6
期刊: THIN SOLID FILMS
Volume: 420
Issue: 
起始頁: 219
結束頁: 224
顯示於類別:會議論文


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