標題: Sol-gel derived (Ba0.5Sr0.5)TiO3 thin films and their electrical and dielectric properties
作者: Nayak, M
Lee, SY
Tseng, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: sol-gel;thin film;barium strontium titanate (BST);dielectric constant
公開日期: 2001
摘要: Barium strontium titanate thin films with composition (Ba0.5Sr0.5)TiO3 were prepared by a sot-gel method using hydroxide-alkoxide precursors. Reasonably well-crystallized film was obtained at a temperature as low as 500 degreesC. The leakage current characteristics and dielectric constant of the films varied with the annealing temperature due to the change in microstructure. The electrical and dielectric properties of the films showed strong dependence on the precursor solution concentration. Dielectric response of the films prepared from dilute solution is superior to that prepared from the concentrated solution. The change in electrical and dielectric characteristics of the films has been correlated to their microstructure, which revealed that the concentration change affected the grain size distribution, film porosity and morphology.
URI: http://hdl.handle.net/11536/29943
http://dx.doi.org/10.1080/00150190108008744
ISSN: 0015-0193
DOI: 10.1080/00150190108008744
期刊: FERROELECTRICS
Volume: 259
Issue: 1-4
起始頁: 239
結束頁: 249
顯示於類別:會議論文


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