CMOS compatible thermoelectric infrared sensors

Title:	CMOS compatible thermoelectric infrared sensors
Authors:	Shown, CS Chi, S 光電工程學系 Department of Photonics
Issue Date:	22-Jun-2000
Abstract:	A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices.
URI:	http://dx.doi.org/10.1049/el:20000823 http://hdl.handle.net/11536/30455
ISSN:	0013-5194
DOI:	10.1049/el:20000823
Journal:	ELECTRONICS LETTERS
Volume:	36
Issue:	13
Begin Page:	1117
End Page:	1118
Appears in Collections:	Articles

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.