標題: Wireless Temperature Sensing using a Passive RFID Tag with Film Bulk Acoustic Resonator
作者: Lin, Jon-Hong
Kao, Yao-Huang
電信工程研究所
Institute of Communications Engineering
關鍵字: RFID;Temperature Sensing;FBAR;AlN
公開日期: 2008
摘要: The lifetime of active RFID tag is limited by the equipped battery capacity. A passive RFID tag which gathers power via inductive coupling from RF power for temperature sensing was proposed to extend the lifetime of the tag. An oscillator with film bulk acoustic resonator (FBAR) ties at the heart of the tag. A four-layered FBAR with Al/AlN/SiN(x)/Au composite structure was fabricated. The oscillation frequency of the oscillator varies with the temperature linearly. The temperature can be detected easily by measuring the shift of oscillation frequency. The measured phase noise of the oscillator is -75dBc/Hz at 10 kHz offset. A linear temperature sensitivity of -34.5 ppm/degrees C in the temperature range from 10 and 80 degrees C at 2.48 GHz is achieved.
URI: http://hdl.handle.net/11536/3118
http://dx.doi.org/10.1109/ULTSYM.2008.0547
ISBN: 978-1-4244-2428-3
ISSN: 1051-0117
DOI: 10.1109/ULTSYM.2008.0547
期刊: 2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX
起始頁: 2209
結束頁: 2212
顯示於類別:會議論文


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