標題: | Wireless Temperature Sensing using a Passive RFID Tag with Film Bulk Acoustic Resonator |
作者: | Lin, Jon-Hong Kao, Yao-Huang 電信工程研究所 Institute of Communications Engineering |
關鍵字: | RFID;Temperature Sensing;FBAR;AlN |
公開日期: | 2008 |
摘要: | The lifetime of active RFID tag is limited by the equipped battery capacity. A passive RFID tag which gathers power via inductive coupling from RF power for temperature sensing was proposed to extend the lifetime of the tag. An oscillator with film bulk acoustic resonator (FBAR) ties at the heart of the tag. A four-layered FBAR with Al/AlN/SiN(x)/Au composite structure was fabricated. The oscillation frequency of the oscillator varies with the temperature linearly. The temperature can be detected easily by measuring the shift of oscillation frequency. The measured phase noise of the oscillator is -75dBc/Hz at 10 kHz offset. A linear temperature sensitivity of -34.5 ppm/degrees C in the temperature range from 10 and 80 degrees C at 2.48 GHz is achieved. |
URI: | http://hdl.handle.net/11536/3118 http://dx.doi.org/10.1109/ULTSYM.2008.0547 |
ISBN: | 978-1-4244-2428-3 |
ISSN: | 1051-0117 |
DOI: | 10.1109/ULTSYM.2008.0547 |
期刊: | 2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX |
起始頁: | 2209 |
結束頁: | 2212 |
顯示於類別: | 會議論文 |