標題: In-situ fabrication of Tl-based superconducting thin films by two-zone RF-sputtering
作者: Wang, SJ
Juang, JY
Shih, LC
Nee, CS
Wu, KH
Uen, TM
Gou, YS
交大名義發表
電子物理學系
National Chiao Tung University
Department of Electrophysics
公開日期: 1-六月-1997
摘要: Attempts to fabricate Tl-based superconducting thin films in-situ were made using a two-zone off-axis rf-sputtering method. The effects of Tl2O partial pressure on the phase formation and growth of various Tl-based superconducting phases were first investigated by an ex-situ two zone postannealing scheme to simulate the depsoition environ ment of subsequent in-situ process. The conditions obtained were then used as guidelines for in-situ processes. The rf-sputtering system used for in-situ de position is equipped with heating facilities capable of controlling the temperatures of the substrates and the Tl2O3 source separately. Preliminary results indicate that, by varying the substrate temperature and the partial pressure of Tl2O in a similar manner, Tl-based superconducting phases can be obtained in-situ with properties comparable to those obtained by two-step annealing processes.
URI: http://hdl.handle.net/11536/498
ISSN: 1051-8223
期刊: IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
Volume: 7
Issue: 2
起始頁: 1891
結束頁: 1894
顯示於類別:會議論文


文件中的檔案:

  1. A1997XH86600192.pdf

若為 zip 檔案,請下載檔案解壓縮後,用瀏覽器開啟資料夾中的 index.html 瀏覽全文。