標題: Anodic-aluminum-oxide templated carbon nanotubes in the field emission triode
作者: Lin, Chen-Chun
Chang, Kai-Chun
Pan, Fu-Ming
Kuo, Cheng-Tzu
Liu, Mei
Mo, Chi-Neng
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 2007
摘要: To fabricate the field-emission triode structure, carbon nanotubes (CNT) were used as field emitters and grown in the anodic aluminum oxide (AAO). AAO thin layer with vertical pore channels was first prepared on the Si (100) substrate and was used to template the following growth of CNTs in an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system. The tetraethoxysilane (TEOS) oxide and At layer were deposited on the CAITs and acted as the dielectric layer and gate electrode layers for the triode structure, respectively. Reactive ion and wet etches were then used to open the field-emission area in the triode. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on field of similar to 8.05 V/mu m was measured.
URI: http://hdl.handle.net/11536/8468
http://dx.doi.org/10.1889/1.2785370
ISSN: 0097-966X
DOI: 10.1889/1.2785370
期刊: 2007 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXVIII, BOOKS I AND II
Volume: 38
起始頁: 590
結束頁: 592
顯示於類別:會議論文