微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I)

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DC Field	Value	Language
dc.contributor.author	成維華	en_US
dc.contributor.author	WEI-HUACHIENG	en_US
dc.date.accessioned	2014-12-13T10:34:02Z	-
dc.date.available	2014-12-13T10:34:02Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-2212-E009-024	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92459	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=877057&docId=168253	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I)	zh_TW
dc.title	The Dynamic Analysis and Optimal Control of Impact Drive Mechanism for Lithograph Stepper (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程研究所	zh_TW
Appears in Collections:	Research Plans

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