| Title: | 複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用---子計畫III:MILC低溫複晶矽薄膜電晶體之退火製程開發、新穎結構及小尺寸元件之製作及研究(II) Study of Low Temperautre MILC Poly-Si Film and Its Application on Novel Strucutre Small Dimensional TFTs (II) |
| Authors: | 張俊彥 CHANG CHUN-YEN 交通大學電子工程系 |
| Issue Date: | 2002 |
| Gov't Doc #: | NSC91-2215-E009-032 |
| URI: | http://hdl.handle.net/11536/92787 https://www.grb.gov.tw/search/planDetail?id=736765&docId=139419 |
| Appears in Collections: | Research Plans |
