高深寬比的次微米結構的模具開發與熱壓成形之研究(I)

標題:	高深寬比的次微米結構的模具開發與熱壓成形之研究(I) A Study on the Mold Development and the Hot Embossing Replication of High Aspect Ratio Sub-Micron Structures (I)
作者:	陳仁浩 CHEN REN HAW 交通大學機械工程系
公開日期:	2002
官方說明文件#:	NSC91-2212-E009-021
URI:	http://hdl.handle.net/11536/93354 https://www.grb.gov.tw/search/planDetail?id=750530&docId=142576
Appears in Collections:	Research Plans

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