次波長表面浮雕光柵光學元件的製作及運用

Title:	次波長表面浮雕光柵光學元件的製作及運用 Fabrication and Applications of Sub-Wavelength Surface-Relief Optical Grating Devices
Authors:	謝漢萍 SHIEH HAN-PING DAVID 交通大學光電工程研究所
Keywords:	表面浮雕光柵;向量繞射理論;次波長;電子束;直接寫入;Surface-relief grating;Vector diffraction theory;Sub-wavelength;E-bean;Direct write
Issue Date:	1999
Gov't Doc #:	NSC88-2215-E009-011
URI:	http://hdl.handle.net/11536/94243 https://www.grb.gov.tw/search/planDetail?id=418388&docId=74233
Appears in Collections:	Research Plans

APA	謝., & SHIEH H. DAVID (1999). 次波長表面浮雕光柵光學元件的製作及運用. https://www.grb.gov.tw/search/planDetail?id=418388&docId=74233.
Bibtex	@article{1999, title={次波長表面浮雕光柵光學元件的製作及運用}, author={謝漢萍 and SHIEH HAN-PING DAVID}, journal={https://www.grb.gov.tw/search/planDetail?id=418388&docId=74233}, year={1999}, url={https://ir.lib.nycu.edu.tw/handle/11536/94243}, }