一種創新型批次強健控制器應用於半導體混貨製程開發研究

Abstract

本計畫為兩年期之計畫，計畫目的主要針對半導體混貨製程開發一套批次控制方法 以及提出一個通用型混貨控制架構，以處理混貨製程之系統不確定性；第一年度中，首 先分析半導體混貨製程現況以及現有混貨控制器之優劣點，針對混貨製程之干擾特性， 建構一結合產品與機台之干擾觀測器(Combined Product and Tool Disturbance Estimator, CPTDE)，並分析CPTDE 之穩定性與效能表現，透過實際混貨製程歷史資料來驗證 CPTDE，並與其他現有混貨控制器比較性能優劣。在第二年度，對於混貨製程之系統不 確定性及製程干擾型態，本計畫提出一個通用型混貨控制架構：輸出干擾觀測器(Output Disturbance Observer, ODOB)架構，並且利用小增益理論(Small gain theory)進行有系統性 的分析混貨製程之系統不確定性、強健穩定性以及強健性能等性質。而且，本計畫所提 出之OBOD 架構希望能夠整合其他混貨控制方法，並進行其他混貨控制器無法達成之 混貨不確定性分析，最後藉由混貨製程歷史資料來驗證本計畫所提出之通用型混貨控制 架構之可行性。

This is a two-year project. The purpose of the project is to develop a Run-to-Run (RtR) control method and a general framework of mixed product control for semiconductor manufacturing mixed product processes. In the first year, we will analyze the characteristic of mixed product processes in semiconductor manufacturing and briefly review the mixed product controllers proposed by other authors. For the characteristic of disturbances in mixed product processes, this project will constructive the Combined Product and Tool Disturbance Estimator, CPTDE, and the stability and performance of CPTDE will be analyzed with various disturbances. The CPTDE will utilize the actual historical mixed product data to compare the control performance with the other mixed product controllers. In the second year, this project will propose a general framework of mixed product control: the Output Disturbance Observer, ODOB, structure for the system uncertainty and the disturbances’ characteristic in mixed product processes. Moreover, we will propose a systematical analysis procedure which will perform the system’s robust stability and robust performance analysis within Small gain theory in mixed product processes. The advantages of the ODOB structure will not only integrate with other mixed product controllers, but also perform the mixed product uncertainty analysis which the other controllers cannot be done. We will verify the general framework of ODOB structure by using the actual historical mixed product data.