Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor
| dc.citation.patentcountry | USA | zh_TW |
| dc.citation.patentnumber | 08685262 | zh_TW |
| dc.contributor.author | Tsai Chuen-Jinn | en_US |
| dc.contributor.author | Chen Sheng-Chieh | en_US |
| dc.contributor.author | Chen Hong-Dar | en_US |
| dc.date.accessioned | 2014-12-16T06:13:53Z | |
| dc.date.available | 2014-12-16T06:13:53Z | |
| dc.date.issued | 2014-04-01 | en_US |
| dc.description.abstract | A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate. | zh_TW |
| dc.identifier.govdoc | C23F001/00 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/104399 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor | zh_TW |
| dc.type | Patents | en_US |