Fabrication and characterization of the Pd-silicided emitters for field-emission devices

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A1995BE29Y00017.pdf (457.78 KB)

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Authors

DOI

10.1117/12.220936

Keywords

Pd silicided , field emitter , micromachining , sharpening , annealing , TEM , AES

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http://dx.doi.org/10.1117/12.220936
https://ir.lib.nycu.edu.tw/handle/11536/19969

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會議論文;;Conferences Paper