集束型化學氣相沉積製程設備模擬器及訓練器之軟體設計製作(Ⅱ)
| dc.contributor.author | 李安謙 | en_US |
| dc.contributor.author | LEE AN-CHEN | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:32:48Z | |
| dc.date.available | 2014-12-13T10:32:48Z | |
| dc.date.issued | 2004 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC93-AT-7009-001 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=912040&docId=172361 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/91724 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 集束型化學氣相沉積製程設備模擬器及訓練器之軟體設計製作(Ⅱ) | zh_TW |
| dc.title | The Development of Software Simulator and Trainer of Chemical Vapor Deposition Equipment for Cluster Tool Manufacturing(II) | en_US |
| dc.type | Plan | en_US |
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