METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR
| dc.citation.patentcountry | USA | zh_TW |
| dc.citation.patentnumber | 20140027406 | zh_TW |
| dc.contributor.author | TSAI Chuen-Jinn | en_US |
| dc.contributor.author | CHEN Sheng-Chieh | en_US |
| dc.contributor.author | CHEN Hong-Dar | en_US |
| dc.date.accessioned | 2014-12-16T06:14:51Z | |
| dc.date.available | 2014-12-16T06:14:51Z | |
| dc.date.issued | 2014-01-30 | en_US |
| dc.description.abstract | A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate. | zh_TW |
| dc.identifier.govdoc | B44C001/22 | zh_TW |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/104961 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR | zh_TW |
| dc.type | Patents | en_US |