High numerical-aperture microlens fabricated by focused ion beam milling - art. no. 66200L
| dc.citation.epage | L6200 | en_US |
| dc.citation.spage | L6200 | en_US |
| dc.citation.volume | 6620 | en_US |
| dc.contributor.author | Chiu, Yi | en_US |
| dc.contributor.author | Huang, Chien-Hsun | en_US |
| dc.contributor.author | Hsu, Ying-Chien | en_US |
| dc.contributor.department | 電控工程研究所 | zh_TW |
| dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:10:30Z | |
| dc.date.available | 2014-12-08T15:10:30Z | |
| dc.date.issued | 2007 | en_US |
| dc.description.abstract | The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m. | en_US |
| dc.identifier.doi | 10.1117/12.738639 | en_US |
| dc.identifier.isbn | 978-0-8194-6762-1 | en_US |
| dc.identifier.issn | 0277-786X | en_US |
| dc.identifier.journal | Optical Data Storage 2007 | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1117/12.738639 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/8013 | |
| dc.identifier.wosnumber | WOS:000250199900012 | |
| dc.language.iso | en_US | en_US |
| dc.subject | numerical aperture | en_US |
| dc.subject | microlens | en_US |
| dc.subject | focused ion beam | en_US |
| dc.subject | silicon nitride | en_US |
| dc.title | High numerical-aperture microlens fabricated by focused ion beam milling - art. no. 66200L | en_US |
| dc.type | Proceedings Paper | en_US |