CMOS-MEMS accelerometer with differential LC-tank oscillators

dc.citation.epage	169	en_US
dc.citation.spage	166	en_US
dc.contributor.author	Chiu, Yi	en_US
dc.contributor.author	Hong, Hao-Chiao	en_US
dc.contributor.author	Wu, Po-Chih	en_US
dc.contributor.department	電機資訊學士班	zh_TW
dc.contributor.department	Undergraduate Honors Program of Electrical Engineering and Computer Science	en_US
dc.date.accessioned	2014-12-08T15:30:10Z
dc.date.available	2014-12-08T15:30:10Z
dc.date.issued	2012	en_US
dc.description.abstract	This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 mu m CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by external acceleration. The device has been characterized and has a mechanical resonance frequency of 3.3 kHz, sensitivity of 3.7 MHz/g, and nonlinearity of 1.8%.	en_US
dc.identifier.isbn	978-1-4577-1766-6	en_US
dc.identifier.issn	1930-0395	en_US
dc.identifier.journal	2012 IEEE SENSORS PROCEEDINGS	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/21607
dc.identifier.wosnumber	WOS:000315671100042
dc.language.iso	en_US	en_US
dc.title	CMOS-MEMS accelerometer with differential LC-tank oscillators	en_US
dc.type	Proceedings Paper	en_US

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