半導體批次製程可變量測延遲控制器開發研究
| dc.contributor.author | 李安謙 | en_US |
| dc.contributor.author | LEE AN-CHEN | en_US |
| dc.contributor.department | 國立交通大學機械工程學系（所） | zh_TW |
| dc.date.accessioned | 2014-12-13T10:38:21Z | |
| dc.date.available | 2014-12-13T10:38:21Z | |
| dc.date.issued | 2013 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC102-2221-E009-052-MY2 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=3103414&docId=419926 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/95269 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 半導體批次製程可變量測延遲控制器開發研究 | zh_TW |
| dc.title | The Development of Semiconductor Run-To-Run Process Controller with Variable Measurement Delay | en_US |
| dc.type | Plan | en_US |
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