Electrochemically Synthesized Nanocomposites for MEMS Device Performance Enhancement

Abstract

In this paper, a performance enhancement scheme of MEMS devices is presented based on the implementation of electrochemically synthesized nanocomposites including Ni-diamonds, Ni-CNTs, NiFe-AAO CoNiMnP AAO etc.. Via the incorporation of nano-sized materials, the matrix material as a part of devices structure can exhibit distinct physical characteristics resulting from composite and shape effects for better device performance. Owing to the process advantages of low temperature and high compatibility with wafer-level CMOS process, the cost-effective electrochemical process technology has shown its potential for various MEMS applications.