半導體廠自動化設備控制界面程式模組化建構之研究
| dc.contributor.author | 彭德保 | en_US |
| dc.contributor.author | PERNG DER-BAAU | en_US |
| dc.contributor.department | 交通大學工業工程與管理系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:29:27Z | |
| dc.date.available | 2014-12-13T10:29:27Z | |
| dc.date.issued | 2000 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC89-2212-E009-028 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=513735&docId=93107 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/89311 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 自動化設備控制界面程式 | zh_TW |
| dc.subject | 模組化 | zh_TW |
| dc.subject | 結構化方法 | zh_TW |
| dc.subject | Automatic equipment control interface | en_US |
| dc.subject | Modularized | en_US |
| dc.subject | Structured methodology | en_US |
| dc.title | 半導體廠自動化設備控制界面程式模組化建構之研究 | zh_TW |
| dc.title | The Construction of a Modularized Machine and Monitoring Emulater for a Wafer Fab | en_US |
| dc.type | Plan | en_US |