Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations
| dc.citation.epage | 190 | en_US |
| dc.citation.spage | 189 | en_US |
| dc.contributor.author | Chen, Cheng-An | en_US |
| dc.contributor.author | Chiu, Yi | en_US |
| dc.contributor.department | 電機工程學系 | zh_TW |
| dc.contributor.department | Department of Electrical and Computer Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:20:53Z | |
| dc.date.available | 2014-12-08T15:20:53Z | |
| dc.date.issued | 2011 | en_US |
| dc.description.abstract | A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented. | en_US |
| dc.identifier.isbn | 978-1-4577-0336-2 | en_US |
| dc.identifier.journal | OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/14870 | |
| dc.identifier.wosnumber | WOS:000297850100080 | |
| dc.language.iso | en_US | en_US |
| dc.subject | scanning mirror | en_US |
| dc.subject | vertical comb drive | en_US |
| dc.subject | flip-up | en_US |
| dc.subject | assembly | en_US |
| dc.title | Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations | en_US |
| dc.type | Proceedings Paper | en_US |
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