EFFECT OF THE MIXED N-2/O-2 OXIDATION PROCESS ON IMPROVEMENT OF THE SENSITIVITY OF THE SIGE NANO-WIRE
| dc.citation.epage | 154 | en_US |
| dc.citation.spage | 145 | en_US |
| dc.citation.volume | 35 | en_US |
| dc.citation.woscount | 0 | en_US |
| dc.contributor.author | Chang, Kow-Ming | en_US |
| dc.contributor.author | Chen, Chu-Feng | en_US |
| dc.contributor.author | Lai, Chiung-Hui | en_US |
| dc.contributor.author | Wang, Yu-Bin | en_US |
| dc.contributor.author | Liu, Chung-Hsien | en_US |
| dc.contributor.author | Hsieh, Cheng-Ting | en_US |
| dc.contributor.author | Wu, Chin-Ning | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2019-04-02T06:04:34Z | |
| dc.date.available | 2019-04-02T06:04:34Z | |
| dc.date.issued | 2011-01-01 | en_US |
| dc.description.abstract | Ge condensation has been reported to improve the hole mobility of the SiGe-on-insulator (SGOI). Our previous studies have shown that the higher Ge fraction of Si1-xGex nano-wire exhibits higher sensitivity. In this work, we investigated the effect of different oxidation recipe to provide information on the sensitivity of SiGe nano-wire. The 3-amino-propyltrime-thoxy-silane (APTMS) is used to modify the nano-wire's surface potential. Induced sensitivity characteristics of the samples were preformed to estimate the improvement effect. The mixed N-2/O-2 oxidation process with optimization ratio can be an effective technology to improve the sensitivity of SGOI nano-wires. | en_US |
| dc.identifier.doi | 10.1149/1.3653933 | en_US |
| dc.identifier.issn | 1938-5862 | en_US |
| dc.identifier.journal | SENSORS, ACTUATORS, AND MICROSYSTEMS (GENERAL) - 219TH ECS MEETING | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1149/1.3653933 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/150553 | |
| dc.identifier.wosnumber | WOS:000300930300016 | en_US |
| dc.language.iso | en_US | en_US |
| dc.title | EFFECT OF THE MIXED N-2/O-2 OXIDATION PROCESS ON IMPROVEMENT OF THE SENSITIVITY OF THE SIGE NANO-WIRE | en_US |
| dc.type | Proceedings Paper | en_US |
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