12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫I：12吋矽晶圓CVD製程設備的加熱及成長BST薄膜之進氣系統設計與反應爐系統整合(I)
| dc.contributor.author | 林清發 | en_US |
| dc.contributor.author | LIN TSING-FA | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:49:29Z | |
| dc.date.available | 2014-12-13T10:49:29Z | |
| dc.date.issued | 2000 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC89-2212-E009-038 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=501193&docId=90357 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/101659 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | CVD反應爐 | zh_TW |
| dc.subject | 加熱設計 | zh_TW |
| dc.subject | 流力設計 | zh_TW |
| dc.subject | CVD reactor | en_US |
| dc.subject | Heating design | en_US |
| dc.subject | Flow design | en_US |
| dc.title | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫I：12吋矽晶圓CVD製程設備的加熱及成長BST薄膜之進氣系統設計與反應爐系統整合(I) | zh_TW |
| dc.title | Design of Heating Assembly and Gas Feeding Unit for BST Thin Film Growth and Integration of CVD Reactor System for a 12-Inch Single Silicon Wafer (I) | en_US |
| dc.type | Plan | en_US |