預測干擾觀測器應用於半導體製程的隨機干擾之開發研究
| dc.contributor.author | 李安謙 | zh_TW |
| dc.contributor.author | LEE AN-CHEN | en_US |
| dc.contributor.department | 國立交通大學機械工程學系（所） | zh_TW |
| dc.date.accessioned | 2016-03-29T00:01:13Z | |
| dc.date.available | 2016-03-29T00:01:13Z | |
| dc.date.issued | 2016 | en_US |
| dc.description.sponsorship | 科技部 | zh_TW |
| dc.identifier.govdoc | MOST104-2221-E009-027-MY2 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=11718500&docId=478720 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/130921 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 預測干擾觀測器應用於半導體製程的隨機干擾之開發研究 | zh_TW |
| dc.title | Predictive Disturbance Observer Structure Applied to Semiconductor Manufacturing Process under Different Kinds of Stochastic Disturbances | en_US |
| dc.type | Plan | en_US |
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