熱導型高氣壓微感測元件之研究

dc.contributor.author	謝正雄	en_US
dc.contributor.department	國立交通大學光電工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:39:03Z
dc.date.available	2014-12-13T10:39:03Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2215-E009-040	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=234551&docId=43050	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/96031
dc.language.iso	zh_TW	en_US
dc.subject	微感測器	zh_TW
dc.subject	微加工技術	zh_TW
dc.subject	氣體壓力感測	zh_TW
dc.subject	熱導率	zh_TW
dc.subject	Microsensor	en_US
dc.subject	Micromachining	en_US
dc.subject	Gas pressure sensing	en_US
dc.subject	Thermal conductivity	en_US
dc.title	熱導型高氣壓微感測元件之研究	zh_TW
dc.title	Study on High Pressure Microsensor of Thermal Conductivity Type	en_US
dc.type	Plan	en_US

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