Micromachining program status at the SRRC
| dc.citation.epage | 16 | en_US |
| dc.citation.issue | 1 | en_US |
| dc.citation.spage | 12 | en_US |
| dc.citation.volume | 4 | en_US |
| dc.contributor.author | Cheng, Y | en_US |
| dc.contributor.author | Shew, BY | en_US |
| dc.contributor.author | Shih, WP | en_US |
| dc.contributor.author | Wang, SS | en_US |
| dc.contributor.author | Lin, CY | en_US |
| dc.contributor.author | Yang, WK | en_US |
| dc.contributor.author | Lu, M | en_US |
| dc.contributor.author | Lee, WH | en_US |
| dc.contributor.department | 交大名義發表 | zh_TW |
| dc.contributor.department | National Chiao Tung University | en_US |
| dc.date.accessioned | 2014-12-08T15:01:16Z | |
| dc.date.available | 2014-12-08T15:01:16Z | |
| dc.date.issued | 1997-12-01 | en_US |
| dc.description.abstract | This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved. | en_US |
| dc.identifier.issn | 0946-7076 | en_US |
| dc.identifier.journal | MICROSYSTEM TECHNOLOGIES | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/160 | |
| dc.identifier.wosnumber | WOS:000071130700004 | |
| dc.language.iso | en_US | en_US |
| dc.title | Micromachining program status at the SRRC | en_US |
| dc.type | Article; Proceedings Paper | en_US |