THE PERFORMANCE ENHANCEMENT SCHEME OF ON-CHIP SPIRAL INDUCTORS USING METAL-OXIDE BASED AAO NANOCOMPOSITE

Abstract

The paper presents a scheme to improve the performance of on-chip spiral inductors using metal-oxide based anodic alumina oxide (AAO) nanocomposites such as Fe3O4-AAO nanocomposite used here for demonstration. The fundamental enhancement principle is to eliminate eddy current loss but keep a high ferromagnetic resonance frequency in terms of the additive of nonconductive magnetic nanorod structures. Experimental results show the nH inductors with the nanocomposite magnetic core can exhibit inductance enhancement up to GHz range with Q factor higher than 25.