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微波電漿化學氣相沉積光學鑽石晶片製造技術

dc.contributor.author張立en_US
dc.contributor.authorCHANG LIen_US
dc.contributor.department國立交通大學材料科學與工程學系(所)zh_TW
dc.date.accessioned2014-12-13T10:51:47Z
dc.date.available2014-12-13T10:51:47Z
dc.date.issued2007en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC96-2622-E009-002-CC3zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=1397635&docId=249735en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/102900
dc.language.isozh_TWen_US
dc.title微波電漿化學氣相沉積光學鑽石晶片製造技術zh_TW
dc.titleTechnology for Fabrication of Optical Diamond Wafers by Microwave Plasma Chemical Vapor Depositionen_US
dc.typePlanen_US

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