矽化鎳在超大型積體電路之應用研究(II)

dc.contributor.author	陳茂傑	en_US
dc.contributor.department	國立交通大學電子工程學系	zh_TW
dc.date.accessioned	2014-12-13T10:39:27Z
dc.date.available	2014-12-13T10:39:27Z
dc.date.issued	2001	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC90-2215-E009-067	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=665699&docId=126373	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/96485
dc.language.iso	zh_TW	en_US
dc.subject	矽化鎳	zh_TW
dc.subject	製程技術	zh_TW
dc.subject	極大型積體電路	zh_TW
dc.subject	材料性質	zh_TW
dc.subject	Nickel silicide	en_US
dc.subject	Process technology	en_US
dc.subject	ULSI	en_US
dc.subject	Material property	en_US
dc.title	矽化鎳在超大型積體電路之應用研究(II)	zh_TW
dc.title	Material Properties and Process Technology of Ni-Silicide Relevant to ULSI Applications (II)	en_US
dc.type	Plan	en_US

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