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ESD PROTECTION STRUCTURE FOR 3D IC

dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20120153437zh_TW
dc.contributor.authorChen Kuan-Nengen_US
dc.contributor.authorLai Ming-Fangen_US
dc.contributor.authorChen Hung-Mingen_US
dc.date.accessioned2014-12-16T06:15:12Z
dc.date.available2014-12-16T06:15:12Z
dc.date.issued2012-06-21en_US
dc.description.abstractAn electrostatic discharge (ESD) protection structure for a 3D IC is provided. The ESD protection structure includes a first active layer, a through-silicon via (TSV) device and a second active layer. The TSV is disposed in the first active layer, and the second active layer is stacked with the first active layer. The second active layer includes a substrate and an ESD protection device, wherein the ESD protection device having a doping area embedded in the substrate, and the ESD protection device electrically connects the TSV device.zh_TW
dc.identifier.govdocH01L029/06zh_TW
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/105166
dc.language.isozh_TWen_US
dc.titleESD PROTECTION STRUCTURE FOR 3D ICzh_TW
dc.typePatentsen_US

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