Automatic Positioning Device Design for The Operation Platform of Nano-indentation

Abstract

In this paper, we try to measure the differences among the indentations of single crystal bulks under different rotation angles by nanoindentation test. Besides, we also give a design of positioning device for the nanoindentation measuring system. It is driven by stepping motors and relevant circuits for controlling the rotations of the wafer supporting platform. The drive circuit is connected with microprocessors. The rotation angle of the platform can be adjusted by instructions so that the system can be used to carry out nanoindentation tests in different angles for more precise mechanical properties data of the nanoindentation materials.