嵌附調細式相移光罩研製

dc.contributor.author	龍文安	en_US
dc.contributor.author	Loong Wen-an	en_US
dc.contributor.department	國立交通大學應用化學研究所	zh_TW
dc.date.accessioned	2014-12-13T10:39:03Z
dc.date.available	2014-12-13T10:39:03Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2215-E009-063	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=234554&docId=43051	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/96026
dc.language.iso	zh_TW	en_US
dc.subject	相光移罩	zh_TW
dc.subject	調細相移光罩	zh_TW
dc.subject	微影成像	zh_TW
dc.subject	步進機	zh_TW
dc.subject	吸光相移層	zh_TW
dc.subject	Phase-shifting mask	en_US
dc.subject	APSM	en_US
dc.subject	Microlithography	en_US
dc.subject	Stepper	en_US
dc.subject	Absorptive shifter	en_US
dc.title	嵌附調細式相移光罩研製	zh_TW
dc.title	Fabrication of an Embedded Attenuated Phase-Shifting Mask	en_US
dc.type	Plan	en_US

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