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METHOD FOR GROWING EPITAXIAL DIAMOND

dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20140137795zh_TW
dc.contributor.authorCHANG Lien_US
dc.contributor.authorWU Ping-Hsunen_US
dc.contributor.authorCHIU Kun-Anen_US
dc.date.accessioned2014-12-16T06:14:48Z
dc.date.available2014-12-16T06:14:48Z
dc.date.issued2014-05-22en_US
dc.description.abstractA method for growing epitaxial diamond is provided here. A metallic layer is deposited on a diamond substrate and is followed by an epitaxial diamond film deposited on top of the metallic layer. As a buffer layer, the metallic layer relieves stress accumulated in the thin film of the epitaxial diamond to prevent cracks. In consequence, diamond epitaxial layers with desired thickness and good quality can be obtained.zh_TW
dc.identifier.govdocC30B025/18zh_TW
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/104918
dc.language.isozh_TWen_US
dc.titleMETHOD FOR GROWING EPITAXIAL DIAMONDzh_TW
dc.typePatentsen_US

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