奈米金屬閘MOS元件製程技術之研發
| dc.contributor.author | 葉清發 | en_US |
| dc.contributor.department | 交通大學電子工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:37:53Z | |
| dc.date.available | 2014-12-13T10:37:53Z | |
| dc.date.issued | 2001 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC90-2215-E009-097 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=665793&docId=126396 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/94920 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 奈米結構 | zh_TW |
| dc.subject | 金氧半導體元件 | zh_TW |
| dc.subject | 金屬閘 | zh_TW |
| dc.subject | 積體電路技術 | zh_TW |
| dc.subject | Nanostructure | en_US |
| dc.subject | MOS device | en_US |
| dc.subject | Metal gate | en_US |
| dc.subject | IC technique | en_US |
| dc.title | 奈米金屬閘MOS元件製程技術之研發 | zh_TW |
| dc.title | Study of Nano Metal Gate MOS Device Technology Fabrication | en_US |
| dc.type | Plan | en_US |
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