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Growth of chromium carbide capped-carbon nanotip using bias-assisted microwave plasma chemical vapor deposition

dc.citation.epage134en_US
dc.citation.issueen_US
dc.citation.spage131en_US
dc.citation.volume469en_US
dc.contributor.authorHsu, CHen_US
dc.contributor.authorShi, SCen_US
dc.contributor.authorChen, CFen_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.date.accessioned2014-12-08T15:37:09Z
dc.date.available2014-12-08T15:37:09Z
dc.date.issued2004-12-22en_US
dc.description.abstractChromium carbide capped-carbon nanotips were synthesized using bias-assisted microwave plasma chemical vapor deposition. Such a material grew up to several hundreds of nanometer long and tens of nanometer in diameter. The applied bias voltage is a significant parameter in the growth process whereas the higher bias voltage is effective in increasing the growth rate. However, the higher bias voltage also contributes to a rapid formation of chromium carbide which leads to a shorter length of carbon nanotip at the same time. Higher ion energies also vary the tip diameter due to strong ion bombardment which is a competitor to the deposition process. Our investigations revealed that the growth of chromium carbide capped-carbon nanotips reaches a limit due to the full carburization of chromium. (C) 2004 Elsevier B.V. All rights reserved.en_US
dc.identifier.doi10.1016/j.tsf.2004.08.072en_US
dc.identifier.issn0040-6090en_US
dc.identifier.journalTHIN SOLID FILMSen_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.tsf.2004.08.072en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/25538
dc.identifier.wosnumberWOS:000225724300024
dc.language.isoen_USen_US
dc.subjectchromium carbideen_US
dc.subjectcarbon nanotipen_US
dc.subjectbiasen_US
dc.subjectmicrowave plasma chemical vapor depositionen_US
dc.titleGrowth of chromium carbide capped-carbon nanotip using bias-assisted microwave plasma chemical vapor depositionen_US
dc.typeArticle; Proceedings Paperen_US

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