微機電裝置

Abstract

一種微機電裝置包括一基板、一第一質量塊、一金屬線圈、二第一懸臂、一第二質量塊及多個第二懸臂。第一質量塊位於基板內。金屬線圈環繞於第一質量塊之中。二第一懸臂用以連接基板與第一質量塊，並支撐第一質量塊。第二質量塊位於第一質量塊內。多個第二懸臂用以連接第一質量塊與第二質量塊，並支撐第一質量塊與第二質量塊。 A MEMS apparatus is disclosed. The MEMS apparatus includes a frame, a first mass, a metal coil, two first beams, a second mass, and a plurality of second beams. The first mass is located in the frame. The metal coil is surrounded in the first mass. The frame is connected to the first mass via the two first beams. The two first beams support the first mass. The second mass is located in the first mass. The first mass is connected to the second mass via these second beams. These second beams support the first mass and the second mass.