Effect of deposition temperature on the channel and contact resistance of pentacene thin-film transistors

Abstract

By varying the substrate temperature during the deposition of pentacene, the effect of temperature on the electrical performance of organic thin-film transistors, without serious disturbance of phase transition of pentacene, has been investigated. It has already understood that the device mobility goes up with temperature. The transfer line method is applied to find out the origin behind in the study. First, the channel resistance is more sensitive to the deposition temperature due to the difference size of grain. Second, among the two parts of parasitic resistance, the bulk resistance plays a more important role, and is less fluctuant to the deposition temperature. Furthermore, the contact resistance reduces with increasing deposition temperature, which is probably attributed from the difference of the molecular orientation.