Folded dual-band (2.4/5.2GHz) antenna fabricated on silicon suspended parylene membrane

Abstract

A novel and simple kind of dual-band monopole MEMS membrane antenna fabricated on silicon suspended parylene membrane is presented. This parylene membrane is a flexible polymer film and it can be coated on various shapes and surfaces of materials or even peeled off from materials as thin flexible substrate. Because of its low deposition processing temperature, it is possible to be fabricated on CMOS circuits post process with MEMS technology. This folded monopole parylene membrane antenna provides two resonant paths of different lengths to achieve the desired dual-band (2.4/5.2GHz) operation for Bluetooth and WLAN application. The low cost, easy fabrication, easily stickable and peel-off flexible properties of this parylene membrane makes it very attractive and convenient in any wireless portable devices such as mobile phone, RFID tag, Bluetooth and WLAN devices, even any wearable clothes... etc.