微機電系統校際整合研究---子計畫二：微小機電材料與製程技術發展與研究

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dc.contributor.author羅正忠en_US
dc.contributor.department國立交通大學電子工程學系zh_TW
dc.date.accessioned2014-12-13T10:39:06Z
dc.date.available2014-12-13T10:39:06Z
dc.date.issued1996en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC85-2215-E009-030zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=234537&docId=43046en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/96074
dc.language.isozh_TWen_US
dc.subject微機電系統zh_TW
dc.subject微感測器zh_TW
dc.subject微致動器zh_TW
dc.subject微元件zh_TW
dc.subjectMEMSen_US
dc.subjectMicromachingen_US
dc.subjectMicrosensoren_US
dc.subjectMicroactuatoren_US
dc.subjectMicrodeviceen_US
dc.title微機電系統校際整合研究---子計畫二：微小機電材料與製程技術發展與研究zh_TW
dc.titleMicro-Electro-Mechanical Material and Processes Development and Researchen_US
dc.typePlanen_US

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