Polysilicon Nanowire Sensor Devices Based on High-k Dielectric Membrane for pH Sensing and DNA Detection
| dc.citation.epage | 542 | en_US |
| dc.citation.issue | 3 | en_US |
| dc.citation.spage | 537 | en_US |
| dc.citation.volume | 45 | en_US |
| dc.contributor.author | Wu, Chun-Yu | en_US |
| dc.contributor.author | Hsu, Po-Yen | en_US |
| dc.contributor.author | Wang, Chao-Lung | en_US |
| dc.contributor.author | Liao, Ta-Chuan | en_US |
| dc.contributor.author | Cheng, Huang-Chung | en_US |
| dc.contributor.author | Wu, You-Lin | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:32:46Z | |
| dc.date.available | 2014-12-08T15:32:46Z | |
| dc.date.issued | 2012 | en_US |
| dc.description.abstract | The pH sensing characteristics of poly-Si nanowires with high-k sensing membranes are investigated. As a result, the sensing membrane of HfO2 exhibits higher sensitivity and better reproducibility test as compared with TEOS SiO2, Al2O3, TiO2 films. The sensor device with HfO2 dielectric membrane reveals a great pH sensitivity of 172.8 nA/pH. In additon, the label-free DNA detection ability of the poly-Si nanowires is also demonstrated. The 10-base-long single-strained homopolymers DNA molecule solution with an ultra-low concentration of 0.01nM can be detected by using HfO2 sensing film. Such a poly-Si nanowires structure with HfO2 sensing membrane is very suitable for future biochemical sensors applications. | en_US |
| dc.identifier.doi | 10.1149/1.3700918 | en_US |
| dc.identifier.isbn | 978-1-60768-313-1 | en_US |
| dc.identifier.issn | 1938-5862 | en_US |
| dc.identifier.journal | DIELECTRICS FOR NANOSYSTEMS 5: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING -AND-TUTORIALS IN NANOTECHNOLOGY: MORE THAN MOORE - BEYOND CMOS EMERGING MATERIALS AND DEVICES | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1149/1.3700918 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/22896 | |
| dc.identifier.wosnumber | WOS:000325405800053 | |
| dc.language.iso | en_US | en_US |
| dc.title | Polysilicon Nanowire Sensor Devices Based on High-k Dielectric Membrane for pH Sensing and DNA Detection | en_US |
| dc.type | Proceedings Paper | en_US |