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以ICP-RIE配合複合奈米強化微電鑄之LIGA法製作高寬深比合金模仁之微結構與機械性質

dc.contributor.author涂肇嘉en_US
dc.contributor.department交通大學材料科學與工程系zh_TW
dc.date.accessioned2014-12-13T10:34:53Z
dc.date.available2014-12-13T10:34:53Z
dc.date.issued2002en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC91-2216-E009-020zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=785491&docId=151051en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/93060
dc.language.isozh_TWen_US
dc.title以ICP-RIE配合複合奈米強化微電鑄之LIGA法製作高寬深比合金模仁之微結構與機械性質zh_TW
dc.titleThe Microstructure and Mechanical Property of High Aspect Ratio Mold Insert by LIGA Method of ICP-RIE with Nano-Strengthened Composite Microelectroplatingen_US
dc.typePlanen_US

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