Ultra fast self-corrected polarization modulated ellipsometer
| dc.citation.epage | 2749 | en_US |
| dc.citation.issue | 9 | en_US |
| dc.citation.spage | 2746 | en_US |
| dc.citation.volume | 519 | en_US |
| dc.contributor.author | Tsai, Hsiu-Ming | en_US |
| dc.contributor.author | Chen, Leng-Chun | en_US |
| dc.contributor.author | Chao, Yu-Faye | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:02:20Z | |
| dc.date.available | 2014-12-08T15:02:20Z | |
| dc.date.issued | 2011-02-28 | en_US |
| dc.description.abstract | A high speed self-corrected algorithm is proposed for the polarization modulated ellipsometry (PME). In this post-flight analysis, we prove that a set of optimized ellipsometric parameters (EPs) can be obtained by using the intensities at 4 specific temporal phases. The correction ability to its initial phase by this technique has been demonstrated through a twisted nematic liquid crystals (TN-LC) cell under the driving of a square wave. Furthermore, the optimal modulation amplitude in obtaining the accurate and precise set of EPs will be discussed in this work. (C) 2011 Elsevier B.V. All rights reserved. | en_US |
| dc.identifier.doi | 10.1016/j.tsf.2010.12.087 | en_US |
| dc.identifier.issn | 0040-6090 | en_US |
| dc.identifier.journal | THIN SOLID FILMS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.tsf.2010.12.087 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/1018 | |
| dc.identifier.wosnumber | WOS:000289174200039 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Ellipsometry | en_US |
| dc.subject | Polarimetry | en_US |
| dc.subject | Photoelastic modulator | en_US |
| dc.title | Ultra fast self-corrected polarization modulated ellipsometer | en_US |
| dc.type | Article; Proceedings Paper | en_US |