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漸變式光罩技術開發(I)

dc.contributor.author謝漢萍en_US
dc.contributor.authorSHIEH HAN-PING DAVIDen_US
dc.contributor.department交通大學電子與資訊研究中心zh_TW
dc.date.accessioned2014-12-13T10:34:24Z
dc.date.available2014-12-13T10:34:24Z
dc.date.issued2002en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.identifier.govdocNSC91-2623-7009-013zh_TW
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=691993&docId=131552en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/92715
dc.language.isozh_TWen_US
dc.title漸變式光罩技術開發(I)zh_TW
dc.titleDevelopment of Gray-Scale Masks and Their Applications for Hybrid Micro-Optical Components(I)en_US
dc.typePlanen_US

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