300 mm 多腔製程設備之自動建模及最佳排程
| dc.contributor.author | 李安謙 | en_US |
| dc.contributor.author | LEE AN-CHEN | en_US |
| dc.contributor.department | 國立交通大學機械工程學系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:35:58Z | |
| dc.date.available | 2014-12-13T10:35:58Z | |
| dc.date.issued | 2001 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC90-2212-E009-066 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=645542&docId=121289 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/93683 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 自動建模 | zh_TW |
| dc.subject | 排程 | zh_TW |
| dc.subject | 晶圓製程 | zh_TW |
| dc.subject | 生產管制 | zh_TW |
| dc.subject | Automatic modeling | en_US |
| dc.subject | Scheduling | en_US |
| dc.subject | Wafer process | en_US |
| dc.subject | Production control | en_US |
| dc.title | 300 mm 多腔製程設備之自動建模及最佳排程 | zh_TW |
| dc.title | Automatic Modeling and Optimal Scheduling of Cluster Tool for 300mm Wafers | en_US |
| dc.type | Plan | en_US |
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