平面精密定位系統研製
| dc.contributor.author | 成維華 | en_US |
| dc.contributor.author | WEI-HUACHIENG | en_US |
| dc.contributor.department | 交通大學機械工程研究所 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:37:35Z | |
| dc.date.available | 2014-12-13T10:37:35Z | |
| dc.date.issued | 1998 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC87-2212-E009-016 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=364706&docId=65571 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/94741 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 精密定位 | zh_TW |
| dc.subject | 衝量致動機構 | zh_TW |
| dc.subject | 次微米製程技術 | zh_TW |
| dc.subject | 光學編碼器 | zh_TW |
| dc.subject | 適應控制 | zh_TW |
| dc.subject | Precision positioning | en_US |
| dc.subject | Impact drive mechanism | en_US |
| dc.subject | Submicro process | en_US |
| dc.subject | Optical encoder | en_US |
| dc.subject | Adaptive control | en_US |
| dc.subject | Degree of freedom | en_US |
| dc.title | 平面精密定位系統研製 | zh_TW |
| dc.title | Study and Implement of Planar Precision Positioning System | en_US |
| dc.type | Plan | en_US |